Modeling of a folded spring supporting MEMS gyroscope
"Microelectromechanical systems (MEMS) are integrated mechanical and electrical devices that are fabricated with features micrometers in size. MEMS are used as chemical laboratories on a chip, actuators, sensors, etc. To increase their operational capability, various MEMS sensors are being in...
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Digital WPI
2003
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| Online Access: | https://digitalcommons.wpi.edu/etd-theses/1057 https://digitalcommons.wpi.edu/cgi/viewcontent.cgi?article=2056&context=etd-theses |