Silicon nanowire arrays synthesized using the modified MACE process: Integration into chemical sensors and solar cells
In this work, the influence of the technological process for metal-assisted chemical etching on surface morphology and electrophysical properties of obtained nanostructures has been investigated. It has been demonstrated that the obtained structures with a high aspect ratio could be used both in sen...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
National Academy of Sciences of Ukraine - Institute of Semiconductor Physics
2022
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| Online Access: | View Fulltext in Publisher |