Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution

Two High-Precision Proximity Capacitance CMOS Image Sensors with Large Format and High Resolution

This paper presents newly developed two high-precision CMOS proximity capacitance image sensors: Chip A with 12 µm pitch pixels with a large detection area of 1.68 cm2; Chip B with 2.8 µm pitch 1.8 M pixels for a higher resolution. Both fabricated chips achieved a capacitance detection precision of...

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Bibliographic Details
Main Authors: Goto, T. (Author), Hamori, H. (Author), Kuriyama, N. (Author), Kuroda, R. (Author), Sugama, Y. (Author), Sugawa, S. (Author), Watanabe, Y. (Author), Yamamoto, M. (Author), Yasuda, T. (Author)
Format: Article
Language:English
Published: MDPI 2022
Subjects:
Capacitance
Capacitance detections
CMOS
CMOS image sensor
CMOS integrated circuits
Detection precision
Digital cameras
Fabricated chips
high precision
high resolution
High resolution
High-precision
image sensor
Image sensors
large format
Large-format
Pixels
proximity capacitance
Proximity capacitance
Sensor chips
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