Study of high-low KPFM on a pn-patterned Si surface
Comparative measurements between frequency modulation Kelvin probe force microscopy (FM-KPFM) using low frequency bias voltage and heterodyne FM-KPFM using high frequency bias voltage were performed on the surface potential measurement. A silicon substrate patterned with p- and n-type impurities was...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
NLM (Medline)
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |