High Performance of Liquid-Gated Silicon Nanowire FETs Covered with Ultrathin Layers of Diamond-Like Tetrahedral Amorphous Carbon

High Performance of Liquid-Gated Silicon Nanowire FETs Covered with Ultrathin Layers of Diamond-Like Tetrahedral Amorphous Carbon

Label-free, low-noise, and ultrahigh-sensitive biosensors based on liquid-gated silicon (Si) nanowire (NW) field-effect transistors (FETs) have recently emerged as promising diagnostic tools that can be used for healthcare monitoring and point-of-care applications. However, the sensing capabilities...

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Bibliographic Details
Main Authors: Boichuk, N. (Author), Kutovyi, Y. (Author), Pustovyi, D. (Author), Vitusevich, S. (Author), Weihnacht, V. (Author), Zhang, Y. (Author)
Format: Article
Language:English
Published: John Wiley and Sons Inc 2023
Subjects:
Amorphous carbon
Biosensors
Chemical vapor deposition
Diamond like carbon
diamond-like carbon
Diamonds
Field effect transistors
Field-effect transistor
High quality
Liquid-gated transistor
liquid-gated transistors
Lows-temperatures
low-temperature physical vapor deposition
Low-temperature physical vapor deposition
Nanowire field-effect transistor
nanowire field-effect transistors
Nanowires
Performance
Physical vapor deposition
Physical vapour deposition
Silicon
Silicon nanowire field-effect transistors
Temperature
transport properties
Transport properties
X ray photoelectron spectroscopy
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