Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line

Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line

In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk...

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Bibliographic Details
Main Authors: Georgieva, G. (Author), Mai, C. (Author), Peczek, A. (Author), Seiler, P.M (Author), Zimmermann, L. (Author)
Format: Article
Language:English
Published: Higher Education Press Limited Company 2022
Subjects:
Amorphous Si
Amorphous silicon
BiCMOS technology
Coherent communication
Dual-polarization coherent communication
Dual-polarizations
Efficiency
Grating couplers
Hybrid integration
Photonic BiCMOS
Photonic devices
Polarization
Silicon photonics
Silicon wafers
Transmitters
Two-dimensional grating
Two-dimensional grating coupler (2d GC)
Two-dimensional grating coupler (2D GC)
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