Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line

• Main Authors: Georgieva, G. (Author), Mai, C. (Author), Peczek, A. (Author), Seiler, P.M (Author), Zimmermann, L. (Author)
• Format: Article
• Language: English
• Published: Higher Education Press Limited Company 2022
• Subjects: Amorphous Si; Amorphous silicon; BiCMOS technology; Coherent communication; Dual-polarization coherent communication; Dual-polarizations; Efficiency; Grating couplers; Hybrid integration; Photonic BiCMOS; Photonic devices; Polarization; Silicon photonics; Silicon wafers; Transmitters; Two-dimensional grating; Two-dimensional grating coupler (2d GC); Two-dimensional grating coupler (2D GC)
• Online Access: View Fulltext in Publisher

 In this paper, we report on polarization combining two-dimensional grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of − 5 dB with a wafer variation of ± 1.2 dB. Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension toward O-band devices is also investigated. Graphical Abstract: [Figure not available: see fulltext.]. © 2022, The Author(s).