Challenges of an optical pressure standard in medium vacuum measurements
Optical pressure standards (OPS) using Fabry-Perot (FP) cavities can measure a wide pressure range with high accuracy. National metrology institute of Japan (NMIJ) is developing an OPS for the pressure range of 1 Pa–100 kPa. In this study, the target uncertainty of the OPS, the challenges for measur...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier Ltd
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |