Structural and optical properties of AlN/GaN and AlN/AlGaN/GaN thin films on silicon substrate prepared by plasma assisted molecular beam epitaxy (MBE)

In this study, the Aluminium Nitride/Gallium Nitride (AlN/GaN) layers and Aluminium Nitride/Aluminium Gallium Nitride/Gallium Nitride (AlN/AlGaN/GaN) layer heterostructures were successfully created using technique known as plasma-assisted molecular beam epitaxy (MBE) on silicon substrate. Gallium (...

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Bibliographic Details
Main Authors: Che Abdullah, C.A (Author), Hassan, Z. (Author), Mahyuddin, A. (Author), Mohd Yusoff, M.Z (Author), Xin Jing, H. (Author)
Format: Article
Language:English
Published: Elsevier B.V. 2019
Subjects:
MBE
Online Access:View Fulltext in Publisher