Material-specific high-resolution table-top extreme ultraviolet microscopy

Material-specific high-resolution table-top extreme ultraviolet microscopy

Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific absorption edges available in this spectral range. At the same time, EUV radiation has significantly larger penetr...

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Bibliographic Details
Main Authors: Berthold, L. (Author), Eschen, W. (Author), Gross, H. (Author), Kirsche, A. (Author), Klas, R. (Author), Krause, M. (Author), Limpert, J. (Author), Loetgering, L. (Author), Pertsch, T. (Author), Rothhardt, J. (Author), Schuster, V. (Author), Steinert, M. (Author)
Format: Article
Language:English
Published: Springer Nature 2022
Subjects:
Absorption edges
Element specific
Extreme Ultraviolet
Extreme ultraviolet lithography
Extreme ultraviolet microscopies
Extreme ultraviolet radiations
High resolution
High-resolution imaging
Nanotechnology
Semiconductor devices
Short wavelengths
Specific absorption
Table-top
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