Van der Waals integration of high-κ perovskite oxides and two-dimensional semiconductors

Van der Waals integration of high-κ perovskite oxides and two-dimensional semiconductors

Two-dimensional semiconductors can be used to build next-generation electronic devices with ultrascaled channel lengths. However, semiconductors need to be integrated with high-quality dielectrics—which are challenging to deposit. Here we show that single-crystal strontium titanate—a high-κ perovski...

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Bibliographic Details
Main Authors: Gao, P. (Author), Han, K. (Author), Huang, K. (Author), Renshaw Wang, X. (Author), Wen, W. (Author), Xiong, Q. (Author), Xu, J. (Author), Yang, A.J (Author), Ye, C. (Author), Yu, T. (Author), Zhu, R. (Author)
Format: Article
Language:English
Published: Nature Research 2022
Subjects:
Channel length
High quality
High-κ
Layered semiconductors
Molybdenum compounds
Perovskite
Perovskite oxides
P-type
Sacrificial layer
Selenium compounds
Single crystals
Strontium titanates
Sulfur compounds
Thin-films
Transistors
Tungsten compounds
Two-dimensional semiconductors
Van der Waal
Van der waals' forces
Van der Waals forces
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