Power transfer efficiency and the power threshold for E-H mode transition in inductively coupled plasmas
The effects of gas pressure and gas component on the power transfer efficiency η and transition power threshold P th during the E-H mode transition in inductively coupled plasmas are studied. The evolutions of η during the E-H mode transition in pure Ar and Ar/O2 discharges are similar, i.e., in E-m...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Institute of Physics Inc.
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |