The effects of match circuit on the breakdown process of capacitively coupled plasma driven by radio frequency
The breakdown process of capacitively coupled plasma (CCP) in the presence of a matching network is rarely studied, even though it is the indispensable part of the most laboratory and industrial devices of CCP. Based on the method of Verboncoeur, the solution method of the general "L"-type...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Institute of Physics Inc.
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |