Single β -Ga2O3nanowire based lateral FinFET on Si
A fin field-effect transistor (FinFET) based on single β-Ga2O3 nanowire with a diameter of ∼60 nm transferred to Si substrate is demonstrated. The FinFET device shows good saturation performance within a drain-to-source voltage up to 5 V and exhibits a high on/off ratio of ∼4 × 108, a system-limit l...
Main Authors: | , , , , , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
American Institute of Physics Inc.
2022
|
Subjects: | |
Online Access: | View Fulltext in Publisher |
LEADER | 02117nam a2200457Ia 4500 | ||
---|---|---|---|
001 | 10.1063-5.0086909 | ||
008 | 220510s2022 CNT 000 0 und d | ||
020 | |a 00036951 (ISSN) | ||
245 | 1 | 0 | |a Single β -Ga2O3nanowire based lateral FinFET on Si |
260 | 0 | |b American Institute of Physics Inc. |c 2022 | |
856 | |z View Fulltext in Publisher |u https://doi.org/10.1063/5.0086909 | ||
520 | 3 | |a A fin field-effect transistor (FinFET) based on single β-Ga2O3 nanowire with a diameter of ∼60 nm transferred to Si substrate is demonstrated. The FinFET device shows good saturation performance within a drain-to-source voltage up to 5 V and exhibits a high on/off ratio of ∼4 × 108, a system-limit low leakage current (∼4 fA), and a relatively low subthreshold swing (∼110 mV). Simulation shows that the channel of the FinFET depletes much faster than that of the back-gate FET with negative gate bias, which is consistent with the measurement results. Moreover, trap-related 1/f noise and 1/f2 noise have been identified according to low frequency noise analysis, and a carrier number fluctuation is expected to be the dominant 1/f noise mechanism in the β-Ga2O3 FinFET in this work. © 2022 Author(s). | |
650 | 0 | 4 | |a 1/F noise |
650 | 0 | 4 | |a 1/f-noise |
650 | 0 | 4 | |a Drain current |
650 | 0 | 4 | |a Drain-to-source voltages |
650 | 0 | 4 | |a Fin field-effect transistors |
650 | 0 | 4 | |a FinFET |
650 | 0 | 4 | |a Gallium compounds |
650 | 0 | 4 | |a Leakage currents |
650 | 0 | 4 | |a Low-leakage current |
650 | 0 | 4 | |a On-off ratio |
650 | 0 | 4 | |a Performance |
650 | 0 | 4 | |a Si substrates |
650 | 0 | 4 | |a Sub-threshold swing(ss) |
650 | 0 | 4 | |a β -Ga2O3 |
700 | 1 | |a Jia, C. |e author | |
700 | 1 | |a Lee, Y.J. |e author | |
700 | 1 | |a Li, J. |e author | |
700 | 1 | |a Liu, L. |e author | |
700 | 1 | |a Ma, Y. |e author | |
700 | 1 | |a Park, J.-H. |e author | |
700 | 1 | |a Qu, G. |e author | |
700 | 1 | |a Wang, G. |e author | |
700 | 1 | |a Wang, Y. |e author | |
700 | 1 | |a Wu, S. |e author | |
700 | 1 | |a Xu, S. |e author | |
700 | 1 | |a Yi, X. |e author | |
700 | 1 | |a Zhang, X. |e author | |
700 | 1 | |a Zhang, Y. |e author | |
773 | |t Applied Physics Letters |