Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma -A Brief Introduction
Optical emission spectroscopy has been employed as non-invasive plasma diagnostics method and it is to detect the light emission during titanium nitride deposition using magnetron sputtering plasma discharge. The optical emission from argon and titanium were used to observe the ionization ratio of e...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Physics Publishing
2018
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| Subjects: | |
| Online Access: | View Fulltext in Publisher View in Scopus |