Deposition and characterization of amorphous carbon thin film by thermal CVD

Amorphous carbon-based material has attracted a considerable attention for optoelectronic and photovoltaic applications. This remarkable element has expected to have similar properties as silicon and highly stable. This work is focused on the deposition conditions of amorphous carbon thin film for o...

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Bibliographic Details
Main Authors: Ahmad, N. (Author), Annuar, I. (Author), Kamaruzaman, D. (Author), Mahmood, M.R (Author), Rosly, M.A (Author)
Format: Article
Language:English
Published: Institute of Physics Publishing, 2020
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