Effect of Thickness and Doping Concentration of Aluminium to the Fabrication of ZnO Photoconductive Sensor
The effect of thickness of aluminium doped zinc oxide (AZO), doping concentration of Aluminium as well as the annealing temperature to the fabrication of AZO photoconductor sensor is the main focused of this research. Silvaco TCAD tool is used to fabricate the AZO photoconductor sensor and to obtain...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Physics Publishing,
2020
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| Subjects: | |
| Online Access: | View Fulltext in Publisher View in Scopus |