Early stage growth of amorphous thin film: Average kinetics, nanoscale dynamics, and pressure dependence

Early stage growth of amorphous thin film: Average kinetics, nanoscale dynamics, and pressure dependence

We used the coherent grazing incidence small angle X-ray scattering technique to study the average kinetics and nanoscale dynamics during early-stage a-WSi2 sputter deposition. The kinetic and dynamic properties are examined as a function of pressure, which is known to be a critical factor in determ...

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Bibliographic Details
Main Authors: Headrick, R.L (Author), Ludwig, K.F., Jr (Author), Narayanan, S. (Author), Rainville, M.G (Author), Ulbrandt, J.G (Author), Wagenbach, C. (Author), Wang, C. (Author), Zhou, H. (Author)
Format: Article
Language:English
Published: American Physical Society 2022
Subjects:
Amorphous thin films
Coherent scattering
Continuum mechanics
Deposition
Grazing incidence small-angle X-ray scattering
Growth kinetics
High pressure
Kinetic energy
Kinetic steady state
Kinetics
Kinetics and dynamics
Length scale
Nano scale
Nanotechnology
Pressure dependence
Steady state
Surface roughness
Time parameter
X ray scattering
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