Chemical vapor deposition of sp2-boron nitride films on Al2O3(0001), (11 2 ¯ 0), (1 1 ¯ 02), and (10 1 ¯ 0) substrates
Thin films of boron nitride in its sp2-hybridized form (sp2-BN) have potential uses in UV devices and dielectrics. Here, we explore chemical vapor deposition (CVD) of sp2-BN on various cuts of sapphire: Al2O3 (11 2 ¯ 0), Al2O3 (1 1 ¯ 02), Al2O3 (10 1 ¯ 0), and Al2O3 (0001) using two CVD processes wi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AVS Science and Technology Society
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |