Freeform measurement method based on differential confocal and real-time comparison

Freeform measurement method based on differential confocal and real-time comparison

To meet the need for the high-precision contactless measurement of the freeform surface profile during the manufacturing, we propose a high-precision measurement method that combines the laser differential confocal trigger sensor (LDCTS) and the real-time comparison method using reference planes (RC...

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Bibliographic Details
Main Authors: Li, Y. (Author), Liu, C. (Author), Liu, Y. (Author), Qiu, L. (Author), Song, Y. (Author), Tang, Y. (Author), Wang, W. (Author), Xu, K. (Author), Zhao, W. (Author)
Format: Article
Language:English
Published: Optica Publishing Group (formerly OSA) 2022
Subjects:
Comparison methods
Differential confocal
Errors
Free-form surface
High-precision measurement
Manufacture
Measurement methods
Measurements of
Real- time
Reference plane
Surface profiles
Surface roughness
Time comparison
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