Design and simulation of MEMS moisture sensor using COMSOL multiphysics software
Micro-electro-mechanical system (MEMS) is a hybrid technology that combines electronic, electric and mechanical technology in a micron- size system. This allowed for higher performance and multifunction devices fabricated at much lighter weight and cost effective. One of the major application of MEM...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Science Publishing Corporation Inc
2018
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| Subjects: | |
| Online Access: | View Fulltext in Publisher View in Scopus |