Design and simulation of MEMS moisture sensor using COMSOL multiphysics software
Micro-electro-mechanical system (MEMS) is a hybrid technology that combines electronic, electric and mechanical technology in a micron- size system. This allowed for higher performance and multifunction devices fabricated at much lighter weight and cost effective. One of the major application of MEM...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
Science Publishing Corporation Inc
2018
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Subjects: | |
Online Access: | View Fulltext in Publisher View in Scopus |
LEADER | 02362nam a2200253Ia 4500 | ||
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001 | 10.14419-ijet.v7i4.26.22155 | ||
008 | 220120s2018 CNT 000 0 und d | ||
020 | |a 2227524X (ISSN) | ||
245 | 1 | 0 | |a Design and simulation of MEMS moisture sensor using COMSOL multiphysics software |
260 | 0 | |b Science Publishing Corporation Inc |c 2018 | |
490 | 1 | |t International Journal of Engineering and Technology(UAE) | |
650 | 0 | 4 | |a Capacitance |
650 | 0 | 4 | |a COMSOL |
650 | 0 | 4 | |a Interdigitated device |
650 | 0 | 4 | |a MEMS |
650 | 0 | 4 | |a Moisture sensor |
856 | |z View Fulltext in Publisher |u https://doi.org/10.14419/ijet.v7i4.26.22155 | ||
856 | |z View in Scopus |u https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056727374&doi=10.14419%2fijet.v7i4.26.22155&partnerID=40&md5=f774e7a618c054393080e44d3eed7e5f | ||
520 | 3 | |a Micro-electro-mechanical system (MEMS) is a hybrid technology that combines electronic, electric and mechanical technology in a micron- size system. This allowed for higher performance and multifunction devices fabricated at much lighter weight and cost effective. One of the major application of MEMS is in sensor devices area. This paper highlight the simulation study of a typical moisture sensor fabricated from Tungsten Interdigitated (IDE) MEMS device. Using COMSOL Multiphysics software, the moisture sensor was modelled based on the current material and physical dimension and layout. The model then go through validation proses to its sensitivi ty performance against the experimental result. Subsequently, the optimization on sensor sensitivity was carried out by varying the model parameters including the sensor physical dimension, working temperature and humidity. The simulation result suggest that the sensor sensitivity is highly correlated to the electrode distance value. The average sensitivity of the sensor improved to ~48% better when the distance between reduced to 50% from 6 micron to 3 microntested at temperature between 25 °C to 45°C. This information is valuable as the input to the sensor designer in finalizing the MEMS physical layout in producing highly sensitive moisture sensor devices. © 2018 Authors. | |
700 | 1 | 0 | |a Ismail, M.N. |e author |
700 | 1 | 0 | |a Rashid, A.A. |e author |
700 | 1 | 0 | |a Saad, N.H. |e author |
700 | 1 | 0 | |a Yusoff, N. |e author |
773 | |t International Journal of Engineering and Technology(UAE) |