Heterogeneously integrated light emitting diodes and photodetectors in the metal-insulator-metal waveguide platform
We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a met...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter Open Ltd
2023
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |