The structural and electrical properties of nanostructures ZnO thin films on flexible substrate
Zinc oxide (ZnO) thin films were deposited on Teflon substrates by radio frequency (RF) magnetron sputtering method at different substrate temperature. The dependence of residual stress on the substrate temperature was investigated in this work due to the growth process, the bombardment of energetic...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Insight Society
2017
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| Subjects: | |
| Online Access: | View Fulltext in Publisher View in Scopus |