A free-space method for complex permittivity measurement of bulk and thin film di-electrics at microwave frequencies
A free-space, non-destructive method for measuring the complex permittivity of a double-layer bulk dielectrics and thin film oxide layers at microwave frequencies have been developed. The method utilizes a spot-focusing antenna system in conjunction with a vector network analyzer in the range of 18-...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Subjects: | |
| Online Access: | View Fulltext in Publisher View in Scopus |