Fabrication of multilayer-PDMS based microfluidic device for bio-particles concentration detection

This paper discusses the process technology to fabricate multilayer-Polydimethylsiloxane (PDMS) based microfluidic device for bio-particles concentration detection in Lab-on-chip system. The micro chamber and the fluidic channel were fabricated using standard photolithography and soft lithography pr...

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Bibliographic Details
Main Authors: Majlis, B.Y (Author), Masrie, M. (Author), Yunas, J. (Author)
Format: Article
Language:English
Published: IOS Press 2014
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