Effect of hydrofluoric acid (HF) concentration to pores size diameter of silicon membrane

This paper studies parameters which affect the pore size diameter of a silicon membrane. Electrochemical etching is performed in characterise the parameter involved in this process. The parameter has been studied is volume ratio of hydrofluoric acid (HF) and ethanol as an electrolyte aqueous for ele...

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Bibliographic Details
Main Authors:	Burham, N. (Author), Hamzah, A.A (Author), Majlis, B.Y (Author)
Format:	Article
Language:	English
Published:	IOS Press 2014
Subjects:	alcohol aqueous solution artificial membrane biocompatibility Biocompatible Materials biomaterial channel gating chemistry Conference Paper controlled study density electric field electrochemical analysis Electrochemical etch electrochemical etching Electrochemical etching Electrolyte aqueous solutions Electrolytes Electroplating electroplating industry Ethanol fluoride ion glomerulus filtration hydrofluoric acid Hydrofluoric acid Hydrofluoric Acid Hydrofluoric acid (HF) materials testing Materials Testing membrane Membranes, Artificial nanomaterial nanopore Nanopores Nanoporous Nano-porous Nanostructures particle size Particle Size Pore formation Pore size porosity Porosity potassium hydroxide procedures scanning electron microscopy Scanning electron microscopy silicon Silicon Silicon membrane silicon membrane surface Silicon membranes Surface Properties surface property thickness ultrastructure Volume ratio
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Effect of hydrofluoric acid (HF) concentration to pores size diameter of silicon membrane

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