Accurate Inner Profile Measurement of a High Aspect Ratio Aspheric Workpiece Using a Two-Probe Measuring System
This paper presents a novel method for inner profile measurement and geometric parameter evaluation, such as the radius of the bottom, steepness and straightness of the steep sidewall of a high aspect ratio aspheric workpiece, by utilizing a two-probe measuring system, which includes a lateral displ...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |