Structural and Mechanical Properties of Fluorine-Containing TaCxNy Thin Films Deposited by Reactive Magnetron Sputtering
TaN thin-film coatings are well known for their good mechanical properties, acceptable toughness, as well as good biocompatibility. However, the friction coefficient of these films is some-times too high, or the hemocompatibility is poor. The purpose of this study is to reduce the friction coefficie...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |