Predictive Maintenance System for Wafer Transport Robot Using K-Means Algorithm and Neural Network Model
Maintenance is the technology of continuously monitoring the conditions of equipment and predicting the timing of maintenance for equipment. Particularly in the field of semiconductor manufacturing, where processes are automated, various methods are being tried to minimize the economic losses and ma...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI
2022
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |