Dual-Mode Scandium-Aluminum Nitride Lamb-Wave Resonators Using Reconfigurable Periodic Poling
This paper presents the use of ferroelectric behavior in scandium–aluminum nitride (Scx Al1−x N) to create dual-mode Lamb-wave resonators for the realization of intrinsically config-urable radio-frequency front-end systems. An integrated array of intrinsically switchable dual-mode Lamb-wave resonato...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI
2022
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Subjects: | |
Online Access: | View Fulltext in Publisher |