The Theoretical and Experimental Investigation of the Fluorinated Palladium β-Diketonate Derivatives: Structure and Physicochemical Properties

To search for new suitable Pd precursors for MOCVD/ALD processes, the extended series of fluorinated palladium complexes [Pd(CH3CXCHCO(R))2] with β-diketone [tfa−1,1,1-trifluoro-2,4-pentanedionato (1); pfpa−5,5,6,6,6-pentafluoro-2,4-hexanedionato (3); hfba−5,5,6,6,7,7,7-heptafluoro-2,4-heptanedionat...

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Bibliographic Details
Main Authors: Basova, T.V (Author), Dorovskikh, S.I (Author), Klyamer, D.D (Author), Mirzaeva, I.V (Author), Morozova, N.B (Author), Sukhikh, A.S (Author), Tryakhov, D.E (Author)
Format: Article
Language:English
Published: MDPI 2022
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