High-Frequency Vibration Analysis of Piezoelectric Array Sensor under Lateral-Field-Excitation Based on Crystals with 3 m Point Group

High-Frequency Vibration Analysis of Piezoelectric Array Sensor under Lateral-Field-Excitation Based on Crystals with 3 m Point Group

Based on Mindlin’s first-order plate theory, the high-frequency vibrations of piezoelectric bulk acoustic wave array sensors under lateral-field-excitation based on crystals with 3 m point group are analyzed, and the spectral-frequency relationships are solved, based on which, the optimal length–thi...

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Bibliographic Details
Main Authors: Chen, D. (Author), Kuznetsova, I. (Author), Li, S. (Author), Ma, T. (Author), Nedospasov, I. (Author), Shi, H. (Author), Sun, F. (Author), Tang, Z. (Author), Xu, J. (Author), Zhang, C. (Author)
Format: Article
Language:English
Published: MDPI 2022
Subjects:
3 m point group crystal
3 m point group crystals
Acoustic waves
array devices
Array devices
Array sensors
bulk acoustic wave sensor
Bulk acoustic wave sensors
Crystal resonators
Crystals
Electrodes
energy trapping
Energy trapping
Frequency interference
Group crystals
High-frequency vibrations
Lateral field excitation
lateral-field-excitation
Lithium compounds
Mindlin plates
Piezoelectricity
Quartz
Vibration analysis
Vibrations analysis
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