Prototype Optical Bionic Microphone with a Dual-Channel Mach–Zehnder Interferometric Transducer

Prototype Optical Bionic Microphone with a Dual-Channel Mach–Zehnder Interferometric Transducer

A prototype optical bionic microphone with a dual-channel Mach–Zehnder interferometric (MZI) transducer was designed and prepared for the first time using a silicon diaphragm made by microelectromechanical system (MEMS) technology. The MEMS diaphragm mimicked the structure of the fly Ormia Ochracea’...

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Bibliographic Details
Main Authors: Cai, C. (Author), Hu, X. (Author), Ji, K. (Author), Liu, X. (Author), Qi, Z.-M (Author), Xiong, L. (Author)
Format: Article
Language:English
Published: MDPI 2023
Subjects:
bionic MEMS silicon diaphragm
Bionic microelectromechanical system silicon diaphragm
Bionics
Diaphragms
Directional microphones
Dual channel
Electromechanical devices
high sensitivity
High sensitivity
Interferometrics
Interferometry
Mach-Zehnder
Mach–Zehnder interferometer
MEMS
Microphones
Optical-
optical directional microphone
Optical directional microphone
Silicon
Silicon diaphragm
temperature robustness
Temperature robustness
Vibrations (mechanical)
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