Nitrogen incorporation of nanostructured amorphous carbon thin films by Aerosol-assisted chemical vapor deposition

Nitrogen incorporation of nanostructured amorphous carbon thin films by Aerosol-assisted chemical vapor deposition

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Nanostructured pure a-C and nitrogen doped a-C: N thin films with small particle size of, ~50 nm were obtained by Aerosol-assisted CVD method from the natural precursor camphor oil. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging from 400°C to...

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Bibliographic Details
Main Authors: Dayana, K. (Author), Fadzilah, A.N (Author), Rusop, M. (Author)
Format: Article
Language:English
Subjects:
Absorption co-efficient
Aerosol-assisted chemical vapor depositions
Aerosol-assisted CVD
Aerosols
Amorphous carbon
Atomic force microscope (AFM)
Atomic force microscopy
Carbon films
Chemical vapor deposition
Deposition temperatures
Electric properties
Electrical properties
Field emission scanning electron microscope (FESEM)
Field emission scanning electron microscopes
Ion bombardment
Nanostructured
Nano-structured
Nanostructured amorphous carbon
Nitrogen
Nitrogen incorporation
Ohmic contacts
Optical properties
Thin films
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