Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering
Ti-doped graphite-like carbon (GLC) films with different microstructures and compositions were fabricated using magnetron sputtering technique. The influence of bias voltages on microstructure, hardness, internal stress, adhesion strength and tribological properties of the as-deposited GLC films wer...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2010-10-25.
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| Subjects: | |
| Online Access: | Get fulltext |