Towards a nanostructured thermoelectric generator using ion-track lithography
This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Po...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2008-09-29.
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| Subjects: | |
| Online Access: | Get fulltext |