Integrated optic glass microcantilevers with Bragg grating interrogation
A new method for creating microcantilevers in glass allows integration of optical waveguides and Bragg gratings. Devices are fabricated by high precision sawing, followed by direct UV writing of waveguides with Bragg gratings and then chemical etching to release the freestanding glass structures. Op...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2010.
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| Subjects: | |
| Online Access: | Get fulltext Get fulltext |