A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems
A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric mater...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2003.
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| Subjects: | |
| Online Access: | Get fulltext |