Fundamentals and state of the art
Resonant sensors offer a high performance solution to many sensing applications. This paper presents a review of resonant microsensors based upon resonant structures fabricated in silicon, quartz and gallium arsenide. The methods of coupling the resonator to the measurand are discussed and example s...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
1997.
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| Subjects: | |
| Online Access: | Get fulltext |