Thick-film PZT-metallic triple beam resonator
A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing pro...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2003-06.
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| Subjects: | |
| Online Access: | Get fulltext |