Thick-film PZT-metallic triple beam resonator

Thick-film PZT-metallic triple beam resonator

A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing pro...

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Bibliographic Details
Main Authors: Yan, T (Author), Jones, B E (Author), Rakowski, R T (Author), Beeby, S P (Author), Tudor, M J (Author), White, N M (Author)
Format: Article
Language:English
Published: 2003-06.
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Summary:A metallic triple-beam resonator with thick-film piezoelectric elements to drive and detect the vibrations is presented. The resonator substrate was fabricated by a double-sided photochemical etching technique and the thick-film piezoelectric elements were deposited by a standard screen-printing process. The resonator, 15.5mm long and 7mm wide, has a favoured mode at 6.2 kHz with a Q-factor of 3100.

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