The structural and electrical properties of thermally grown TiO2 thin films
We studied the structural and electrical properties of TiO2 thin films grown by thermal oxidation of e-beam evaporated Ti layers on Si substrates. Time of flight secondary ion mass spectroscopy (TOF-SIMS) was used to analyse the interfacial and chemical composition of the TiO2 thin films. Metal oxid...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2006-02.
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| Subjects: | |
| Online Access: | Get fulltext |