Fabrication of high temperature surface acoustic wave devices for sensor applications
Surface acoustic devices have been shown to be suitable not only for signal processing but also for sensor applications. In this paper high temperature surface acoustic wave devices based on gallium orthophosphate have been fabricated, using a lift-off technique and tested for high frequency applica...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2005.
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| Subjects: | |
| Online Access: | Get fulltext |