Near-band gap luminescence at room temperature from dislocations in silicon
Cathodoluminescence (CL) has been used to investigate room-temperature light emission from dislocations generated by ion-implantation. Czochralski silicon wafers were implanted with boron and silicon ions at a range of doses and energies to produce, after suitable thermal annealing, a band of disloc...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2003-12.
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| Subjects: | |
| Online Access: | Get fulltext |