A multilayer thick-film PZT actuator for MEMs applications
This paper describes a technique for replacing the conventional bonded bulk PZT transducer, commonly used in MEMS devices, with a screen printed equivalent. Previously, the piezoelectric activity available from screen printed PZT has been considerably lower than the bulk material, but recent develop...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2006-11.
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| Subjects: | |
| Online Access: | Get fulltext |