Multifractal properties of Pyrex and silicon surfaces blasted with sharp particles
The blasting of brittle materials with sharp particles is an important fabrication technology in many industrial processes. In particular, for microsystems, it allows the production of devices with feature sizes down to few tens of microns. An important parameter of this process is the surface rough...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2008.
|
| Subjects: | |
| Online Access: | Get fulltext |