In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD

In situ real-time spectroscopic ellipsometry study of HfO2 thin films grown by using the pulsed-source MOCVD

Bibliographic Details
Main Authors: Zheng, Y. (Author), Mizuta, Hiroshi (Author), Tsuchiya, Yoshishige (Author), Endo, M. (Author), Sato, D. (Author), Oda, S. (Author)
Format: Article
Language:English
Published: 2005.
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