Development of nanostructures for thermoelectric microgenerators using ion-track lithography
A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30-80 nm pore diameters) are...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2008-03-27.
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| Subjects: | |
| Online Access: | Get fulltext |