Development of nanostructures for thermoelectric microgenerators using ion-track lithography
A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30-80 nm pore diameters) are...
Main Authors: | , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
2008-03-27.
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Subjects: | |
Online Access: | Get fulltext |